英文名稱

Field-emission scanning electron microscope

功能說明

接收由物體表面經由外加高能電子撞擊後所釋出的電子作為呈像之依據，具深景深的特性，用來觀察物體表面三度空間之微細結構，圖像可清晰至nm等級。搭配eds可做元素定性分析可以數值呈現不同元素的比例或是以圖像方式表現不同元素的分布。

購置日期

100.06.21

購置金額

1,160,000元

廠牌

JEOL

型號

JSM-7600F

儀器規格

SEI resolution 1.0nm（15kV）, 1.5nm（1kV）

Magnification 25 to 1,000,000

(on the image size 120mm 90mm)

Accelerating voltage 0.1kV to 30kV

Probe current 1pA to 200nA 

Aperture angle control lens Built-in

Detectors Upper detector, lower detector

Energy filter New r-filter

Gentle Beam Built-in

Digital image 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels

Specimen airlock chamber One-action specimen exchange mechanism built-in

Specimen stage Eucentric, 5 axes motor control

　　Type IA II III

　　X-Y 70mm×50mm 110mm×80mm 140mm×80mm

　　Tilt -5° to ～＋70° -5° to ＋70° -5° to ＋70°

　　Rotation 360° 360° 360°

　　WD 1.5mm to 25mm 1.5mm to 25mm 1.5mm to 25mm

Evacuation system Two SIPs, TMP, RP

Eco design During normal operation : 1.2kVA

During the sleepmode : 1kVA

During the evacuation system OFF : 0.76kVA

附加配件

能量分散分析儀(EDS)：可作元素之定性及半定量分析，並提供真空鍍膜(鍍白金)設備。