Field-emission scanning electron microscope




Field-emission scanning electron microscope

Additional accessories

Receive the electrons released from the surface of the object after being impacted by external high-energy electrons as the basis for imaging. It has the characteristics of deep depth of field and is used to observe the fine structure of the three-dimensional space on the surface of the object. The image can be clear to the nanometer level. With eds, qualitative analysis of elements can be done, and the ratio of different elements can be presented numerically or the distribution of different elements can be displayed graphically.

Purchase Date


Purchase Amount

NT 1,160,000





Instrument Specifications

SEI resolution 1.0nm(15kV), 1.5nm(1kV)

Magnification 25 to 1,000,000

(on the image size 120mm 90mm)

Accelerating voltage 0.1kV to 30kV

Probe current 1pA to 200nA 

Aperture angle control lens Built-in

Detectors Upper detector, lower detector

Energy filter New r-filter

Gentle Beam Built-in

Digital image 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels

Specimen airlock chamber One-action specimen exchange mechanism built-in

Specimen stage Eucentric, 5 axes motor control

  Type IA II III

  X-Y 70mm×50mm 110mm×80mm 140mm×80mm

  Tilt -5° to ~+70° -5° to +70° -5° to +70°

  Rotation 360° 360° 360°

  WD 1.5mm to 25mm 1.5mm to 25mm 1.5mm to 25mm

Evacuation system Two SIPs, TMP, RP

Eco design During normal operation : 1.2kVA

During the sleepmode : 1kVA

During the evacuation system OFF : 0.76kVA

Additional accessories

Energy Dispersive Analyzer (EDS): It can be used for qualitative and semi-quantitative analysis of elements, and provides vacuum coating (platinum plating) equipment.

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