SEI resolution 1.0nm(15kV), 1.5nm(1kV) Magnification 25 to 1,000,000 (on the image size 120mm 90mm) Accelerating voltage 0.1kV to 30kV Probe current 1pA to 200nA Aperture angle control lens Built-in Detectors Upper detector, lower detector Energy filter New r-filter Gentle Beam Built-in Digital image 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels Specimen airlock chamber One-action specimen exchange mechanism built-in Specimen stage Eucentric, 5 axes motor control Type IA II III X-Y 70mm×50mm 110mm×80mm 140mm×80mm Tilt -5° to ~+70° -5° to +70° -5° to +70° Rotation 360° 360° 360° WD 1.5mm to 25mm 1.5mm to 25mm 1.5mm to 25mm Evacuation system Two SIPs, TMP, RP Eco design During normal operation : 1.2kVA During the sleepmode : 1kVA During the evacuation system OFF : 0.76kVA |